The ToF-SIMS (time-of-flight secondary ion mass spectroscopy) technique can be used to determine the elemental and molecular composition of a sample's surface. It is also very useful for creating 2D maps (from µm2 to cm2) and depth profiles (using a sputtering gun).

The advantages are:

• High mass resolution
• High lateral and depth resolution (200 nm and 1 nm)
• High sensitivity (ppm)
• Parallel detection of all ions
• Elemental, isotopic, and molecular identification
• 3 analysis modes: spectrometry, imaging, depth profiling